Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702734 | Method for forming ruthenium film and apparatus for forming ruthenium film | Shunji YAMAKAWA, Kohichi Satoh, Masato Araki | 2023-07-18 |
| 11680320 | Ruthenium film forming method and substrate processing system | — | 2023-06-20 |