KS

Kohichi Satoh

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #362,211 of 537,848Top 70%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11702734 Method for forming ruthenium film and apparatus for forming ruthenium film Shunji YAMAKAWA, Tadahiro Ishizaka, Masato Araki 2023-07-18