Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637035 | Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof | Masami Akimoto, Katsuhiro Morikawa, Kouichi Mizunaga | 2023-04-25 |
| 11551945 | Substrate processing apparatus including periphery cover body | Katsuhiro Morikawa, Masami Akimoto, Kouichi Mizunaga | 2023-01-10 |