Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637035 | Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof | Satoshi Morita, Masami Akimoto, Kouichi Mizunaga | 2023-04-25 |
| 11600500 | Substrate processing method | Kouzou Tachibana, Kouichi Mizunaga | 2023-03-07 |
| 11551945 | Substrate processing apparatus including periphery cover body | Masami Akimoto, Satoshi Morita, Kouichi Mizunaga | 2023-01-10 |