Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658038 | Method for dry etching silicon carbide films for resist underlayer applications | Angelique Raley, Qiaowei Lou | 2023-05-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658038 | Method for dry etching silicon carbide films for resist underlayer applications | Angelique Raley, Qiaowei Lou | 2023-05-23 |