Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11603313 | Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber | Jennifer Bugayong Luna, Ce Ma, Ashwini K. Sinha | 2023-03-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11603313 | Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber | Jennifer Bugayong Luna, Ce Ma, Ashwini K. Sinha | 2023-03-14 |