Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11603313 | Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber | Atul M. Athalye, Ce Ma, Ashwini K. Sinha | 2023-03-14 |
| 11571651 | Core-shell composite adsorbent for use in hydrogen and helium PSA processes | Neel Rangnekar, Yang Luo | 2023-02-07 |