Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829083 | Detection apparatus, lithography apparatus, article manufacturing method, and detection method | Tomokazu Taki, Toshiki Iwai | 2023-11-28 |
| 11791148 | Variable reduction ratio spherical aberration correction electrostatic lens, wide angle energy analyzer, and two-dimensional electron spectrometer | Hiroshi Daimon, Laszlo Toth | 2023-10-17 |