Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852866 | Waveguide member and waveguide layered product | Taiji Sakai | 2023-12-26 |
| 11829083 | Detection apparatus, lithography apparatus, article manufacturing method, and detection method | Tomokazu Taki, Hiroyuki Matsuda | 2023-11-28 |