Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837484 | Robot arm device and method for transferring wafer | Che-Fu Chen | 2023-12-05 |
| 11581181 | Orientation chamber of substrate processing system with purging function | — | 2023-02-14 |