Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837484 | Robot arm device and method for transferring wafer | Wei-Hua Houng | 2023-12-05 |
| 11779949 | Semiconductor process chamber contamination prevention system | Kai Wei | 2023-10-10 |
| 11756840 | Reflectance measurement system and method thereof | Yan Liu, Daniel Yang | 2023-09-12 |
| 11710620 | Semiconductor process chamber with heat pipe | Kai Wei | 2023-07-25 |
| 11664444 | Fin field-effect transistor with void and method of forming the same | Hsu Ming Hsiao, Ming-Jhe Sie, Hsiu-Hao Tsao, Hong Pin Lin, An Chyi Wei +1 more | 2023-05-30 |
| 11664265 | Systems and methods for robotic arm sensing | Yan Liu, Ming-Feng Chen, Hung-Wen Chen | 2023-05-30 |
| 11664260 | Systems and methods for orientator based wafer defect sensing | Yan Liu, Daniel Yang | 2023-05-30 |
| 11600517 | Screwless semiconductor processing chambers | Bo-Ru CHEN, Yan Liu | 2023-03-07 |