Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835864 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Yu-Piao Fang | 2023-12-05 |
| 11624985 | Methods of defect inspection | Ta-Ching Yu, Shih-Che Wang, Shu-Hao Chang, Yi-Hao Chen, Chen-Yen Kao +1 more | 2023-04-11 |