Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798800 | Method and apparatus for solvent recycling | Chun-Wei LIAO, Tung-Hung FENG, Hui-Chun LEE | 2023-10-24 |
| 11624985 | Methods of defect inspection | Ta-Ching Yu, Shu-Hao Chang, Yi-Hao Chen, Chen-Yen Kao, Te-Chih Huang +1 more | 2023-04-11 |
| 11545361 | Method and apparatus for coating photo resist over a substrate | Tung-Hung FENG, Hui-Chun LEE, Sheng Jiang | 2023-01-03 |