Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851761 | Semiconductor processing tool | Yung-Tsun Liu, Kuang-Wei Cheng, Chih-Tsung Lee, Chyi-Tsong Ni | 2023-12-26 |
| 11735436 | Semiconductor fabrication apparatus | Chih-Tsung Lee, Yun-Tzu Chiu, Chao-Hung WAN, Yi-Ming Lin, Chyi-Tsong Ni | 2023-08-22 |
| 11685994 | CVD device pumping liner | Yi-Ming Lin, Chih-Tsung Lee, Yun-Tzu Chiu, Chao-Hung WAN | 2023-06-27 |
| 11670491 | Radio frequency screen for an ultraviolet lamp system | Po-Wei Liang, Chao-Hung WAN, Yi-Ming Lin, Liu Che Kang | 2023-06-06 |
| 11594401 | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure | Yi-Ming Lin, Po-Wei Liang, Chu-Han HSIEH, Chih-Lung CHENG, Po-Chih Huang | 2023-02-28 |