Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670491 | Radio frequency screen for an ultraviolet lamp system | Sheng-chun Yang, Chao-Hung WAN, Yi-Ming Lin, Liu Che Kang | 2023-06-06 |
| 11594401 | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure | Sheng-chun Yang, Yi-Ming Lin, Chu-Han HSIEH, Chih-Lung CHENG, Po-Chih Huang | 2023-02-28 |