Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774870 | Method for removing a particle from a mask system | Sergey Oshemkov, Joerg Frederik Blumrich, Martin Voelcker, Thomas Scheruebl | 2023-10-03 |
| 11600484 | Cleaning method, semiconductor manufacturing method and a system thereof | Hao-Ming Chang | 2023-03-07 |