Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774870 | Method for removing a particle from a mask system | Shao-Chi Wei, Joerg Frederik Blumrich, Martin Voelcker, Thomas Scheruebl | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774870 | Method for removing a particle from a mask system | Shao-Chi Wei, Joerg Frederik Blumrich, Martin Voelcker, Thomas Scheruebl | 2023-10-03 |