Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791161 | Pattern fidelity enhancement | Yu-Tien Shen, Ya-Wen Yeh, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2023-10-17 |
| 11748540 | Method and structure for mandrel and spacer patterning | Chung-Ming Wang, Chih-Hsiung Peng, Chi-Kang Chang, Shih-Chi Fu | 2023-09-05 |