Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854766 | DC bias in plasma process | Sheng-Liang Pan, Bing Chen, Chia-Yang Hung, Jyu-Horng Shieh, Shu-Huei Suen +1 more | 2023-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854766 | DC bias in plasma process | Sheng-Liang Pan, Bing Chen, Chia-Yang Hung, Jyu-Horng Shieh, Shu-Huei Suen +1 more | 2023-12-26 |