Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804392 | Method of monitoring tool | Chi-Ying Chang, Jih-Churng Twu, Chin-Yun Chen, Yi-Ting Chang, Feng-Yu CHEN | 2023-10-31 |
| 11569062 | Gas delivery system for ion implanter | Jih-Churng Twu, Yi-Ting Chang, Chao-Po Lu, Tsung-Min Lin | 2023-01-31 |