Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764042 | Method and apparatus for reducing vacuum loss in an ion implantation system | Tsung-Min Lin, Fang-Chi Chien, Cheng-Yi Huang | 2023-09-19 |
| 11569062 | Gas delivery system for ion implanter | Hom-Chung Lin, Jih-Churng Twu, Yi-Ting Chang, Tsung-Min Lin | 2023-01-31 |