Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852126 | Cryopump system, and control device and regeneration method for cryopump system | Kakeru Takahashi | 2023-12-26 |
| 11828521 | Cryopump | — | 2023-11-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852126 | Cryopump system, and control device and regeneration method for cryopump system | Kakeru Takahashi | 2023-12-26 |
| 11828521 | Cryopump | — | 2023-11-28 |