Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852126 | Cryopump system, and control device and regeneration method for cryopump system | Shuhei Gotanda | 2023-12-26 |
| 11644024 | Cryopump | — | 2023-05-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852126 | Cryopump system, and control device and regeneration method for cryopump system | Shuhei Gotanda | 2023-12-26 |
| 11644024 | Cryopump | — | 2023-05-09 |