Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820735 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-11-21 |
| 11739056 | Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2023-08-29 |
| 11740555 | Resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2023-08-29 |
| 11681220 | Resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2023-06-20 |
| 11556056 | Salt, acid generator, resist composition and method for producing resist pattern | Mitsuyoshi Ochiai, Koji Ichikawa | 2023-01-17 |
| 11550218 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-01-10 |