Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822244 | Compound, resin, resist composition and method for producing resist pattern | Takuya Nakagawa, Koji Ichikawa | 2023-11-21 |
| 11815813 | Compound, resin, resist composition and method for producing resist pattern | Takuya Nakagawa, Koji Ichikawa | 2023-11-14 |
| 11739056 | Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern | Yukako Anryu, Koji Ichikawa | 2023-08-29 |
| 11681218 | Compound, resist composition and method for producing resist pattern | Yuichi Mukai, Koji Ichikawa | 2023-06-20 |