Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822241 | Salt, acid generator, resist composition and method for producing resist pattern | Katsuhiro Komuro, Koji Ichikawa | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822241 | Salt, acid generator, resist composition and method for producing resist pattern | Katsuhiro Komuro, Koji Ichikawa | 2023-11-21 |