Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11840503 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-12-12 |
| 11820736 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-11-21 |
| 11822241 | Salt, acid generator, resist composition and method for producing resist pattern | Takashi Nakakoji, Koji Ichikawa | 2023-11-21 |
| 11782342 | Salt and photoresist composition containing the same | Yuki Takahashi, Koji Ichikawa | 2023-10-10 |
| 11548961 | Compound, resin, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-01-10 |
| 11550219 | Salt, quencher, resist composition and method for producing resist pattern, and method for producing salt | Yuki Takahashi, Koji Ichikawa | 2023-01-10 |