Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11628534 | Silicon wafer single-side polishing method | Toshiharu Nakajima, Kazuaki Kozasa, Syunya Kobuchi | 2023-04-18 |
| 11554458 | Polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same | Yuki Nakano, Kazuaki Kozasa, Jiro Kajiwara, Katsutoshi Yamamoto, Takayuki Kihara +1 more | 2023-01-17 |