Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554458 | Polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same | Yuki Nakano, Katsuhisa SUGIMORI, Kazuaki Kozasa, Jiro Kajiwara, Takayuki Kihara +1 more | 2023-01-17 |