| 11787685 |
Process for manufacturing an optical microelectromechanical device having a tiltable structure with an antireflective surface |
Luca SEGHIZZI, Nicolo′ Boni, Laura Oggioni, Marta Carminati |
2023-10-17 |
| 11747611 |
Compact line scan mems time of flight system with actuated lens |
Christopher Townsend |
2023-09-05 |
| 11681141 |
MEMS device having a tiltable suspended structure controlled by electromagnetic actuation |
Sonia Costantini, Riccardo Gianola, Linda Montagna, Francesca Maria Carla Carpignano |
2023-06-20 |
| 11673799 |
Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirror |
Enri Duqi, Nicolo′ Boni, Lorenzo Baldo, Massimiliano MERLI |
2023-06-13 |
| 11675186 |
Hermetically sealed MEMS mirror and method of manufacture |
Giorgio ALLEGATO, Sonia Costantini, Federico VERCESI |
2023-06-13 |
| 11656539 |
Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics |
Nicolo′ Boni, Massimiliano MERLI |
2023-05-23 |
| 11655140 |
Micro-electro-mechanical device with a shock-protected tiltable structure |
Nicolo' BONI, Massimiliano MERLI |
2023-05-23 |
| 11620805 |
Integrated electronic module for 3D sensing applications, and 3D scanning device including the integrated electronic module |
Fabio Bottinelli |
2023-04-04 |
| 11600765 |
Piezoelectric actuator having a deformation sensor and fabrication method thereof |
Domenico Giusti, Carlo Luigi Prelini, Marco Ferrera, Carla Lazzari, Luca SEGHIZZI +2 more |
2023-03-07 |