Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11673799 | Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirror | Enri Duqi, Nicolo′ Boni, Lorenzo Baldo, Roberto Carminati | 2023-06-13 |
| 11655140 | Micro-electro-mechanical device with a shock-protected tiltable structure | Nicolo' BONI, Roberto Carminati | 2023-05-23 |
| 11656539 | Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics | Nicolo′ Boni, Roberto Carminati | 2023-05-23 |