Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11795550 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Keonyoung Kim, Hyosan Lee +2 more | 2023-10-24 |
| 11634632 | Composition for etching | Jin Uk Lee, Jae Wan Park | 2023-04-25 |
| 11634633 | Composition for etching | Jin Uk Lee, Jae Wan Park | 2023-04-25 |
| 11634634 | Composition for etching | Jin Uk Lee, Jae Wan Park | 2023-04-25 |
| 11566178 | Composition for etching and method for manufacturing semiconductor device using same | Jin Uk Lee, Jae Wan Park | 2023-01-31 |