Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851289 | Conveyance system for transferring frame wafer | Hiroaki Nakamura, Toshihiro Kawai, Kosuke Sugiura, Gengoro Ogura | 2023-12-26 |
| 11823923 | Transfer chamber | Toshihiro Kawai, Takashi Shigeta, Munekazu Komiya | 2023-11-21 |
| 11823934 | Wafer stocker | Toshihiro Kawai | 2023-11-21 |
| 11710652 | Transport system | Toshihiro Kawai, Hiroaki Nakamura, Gengoro Ogura, Kosuke Sugiura | 2023-07-25 |
| 11658047 | Exhaust nozzle unit, load port, and EFEM | Atsushi Suzuki, Tomoya Mizutani | 2023-05-23 |
| 11610797 | Wafer stocker | Toshihiro Kawai | 2023-03-21 |