Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662373 | Substrate storage container management system, load port, and substrate storage container management method | Izumi Ito | 2023-05-30 |
| 11658047 | Exhaust nozzle unit, load port, and EFEM | Atsushi Suzuki, Yasushi Taniyama | 2023-05-23 |