Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11692066 | Material for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and compound for forming organic film | Daisuke KORI, Keisuke NIIDA, Takashi SAWAMURA, Takeru Watanabe, Seiichiro Tachibana | 2023-07-04 |
| 11676814 | Material for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Daisuke KORI, Takashi SAWAMURA, Keisuke NIIDA, Seiichiro Tachibana, Takeru Watanabe | 2023-06-13 |
| 11635691 | Composition for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and polymer | Daisuke KORI, Takashi SAWAMURA, Keisuke NIIDA, Seiichiro Tachibana, Takeru Watanabe | 2023-04-25 |
| 11614686 | Resist composition and patterning process | Hironori Satoh, Tsukasa Watanabe, Seiichiro Tachibana, Satoshi Watanabe | 2023-03-28 |
| 11615978 | Method for controlling flatness, method for forming coating film, apparatus for controlling flatness, and apparatus for forming coating film | — | 2023-03-28 |
| 11592287 | Method for measuring distance of diffusion of curing catalyst | Tsukasa Watanabe, Yoshio Kawai, Tomohiro Kobayashi, Yusuke Biyajima, Masahiro Kanayama | 2023-02-28 |