Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851530 | Material for forming organic film, patterning process, and polymer | Daisuke KORI, Takashi SAWAMURA, Keisuke NIIDA | 2023-12-26 |
| 11692066 | Material for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and compound for forming organic film | Daisuke KORI, Keisuke NIIDA, Takashi SAWAMURA, Takeru Watanabe, Tsutomu Ogihara | 2023-07-04 |
| 11676814 | Material for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Daisuke KORI, Takashi SAWAMURA, Keisuke NIIDA, Takeru Watanabe, Tsutomu Ogihara | 2023-06-13 |
| 11635691 | Composition for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and polymer | Daisuke KORI, Takashi SAWAMURA, Keisuke NIIDA, Takeru Watanabe, Tsutomu Ogihara | 2023-04-25 |
| 11614686 | Resist composition and patterning process | Hironori Satoh, Tsukasa Watanabe, Satoshi Watanabe, Tsutomu Ogihara | 2023-03-28 |