Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756815 | Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor | Yong Jun SEO, Sang Hyun SON, Dong Ok AHN | 2023-09-12 |