Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756815 | Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor | Yong Jun SEO, Sang Min HA, Dong Ok AHN | 2023-09-12 |
| 11703520 | Wafer type sensor unit and data acquisition method using the wafer type sensor unit | Yong Jun SEO, Ji Su Hong, Jae-Myoung Lee, Dong Ok AHN | 2023-07-18 |