Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823874 | Substrate treating apparatus and method for controlling temperature of ferrite core | Ogsen Galstyan, Junpyo Lee, Goon Ho Park, Hyun Jin Kim, Young Bin Kim | 2023-11-21 |
| 11587770 | Apparatus and method for treating substrate | Jamyung Gu, Goon Ho Park, Taehoon Jo, Shant ARAKELYAN | 2023-02-21 |
| 11545340 | Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same | Shin-Woo Nam, Hong Won Lee, Jae Bak SHIM | 2023-01-03 |