Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545340 | Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same | Jong Hwan An, Shin-Woo Nam, Hong Won Lee | 2023-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545340 | Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same | Jong Hwan An, Shin-Woo Nam, Hong Won Lee | 2023-01-03 |