Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819872 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Jun SAWASHIMA, Rikuta AOKI | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819872 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Jun SAWASHIMA, Rikuta AOKI | 2023-11-21 |