Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819872 | Substrate processing apparatus and method of machining tubular guard | Takahiro Yamaguchi, Toru Endo, Rikuta AOKI | 2023-11-21 |
| 11810795 | Substrate treating apparatus | Takahiro Yamaguchi, Kenji Kobayashi | 2023-11-07 |
| 11640916 | Substrate processing apparatus and substrate processing method | Takahiro Yamaguchi, Akihisa ENSATSU | 2023-05-02 |
| 11610790 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akito Hatano, Motoyuki Shimai, Toyohide Hayashi | 2023-03-21 |