Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715649 | Substrate processing apparatus | Masayuki ORISAKA | 2023-08-01 |
| 11658054 | Substrate processing apparatus and substrate processing system | — | 2023-05-23 |
| 11621174 | Substrate processing apparatus | Masanobu Sato, Masayuki ORISAKA, Daiki UEHARA | 2023-04-04 |
| 11587803 | Substrate processing apparatus | Masanobu Sato, Masayuki ORISAKA, Daiki UEHARA | 2023-02-21 |