Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621174 | Substrate processing apparatus | Noritake SUMI, Masanobu Sato, Masayuki ORISAKA | 2023-04-04 |
| 11587803 | Substrate processing apparatus | Noritake SUMI, Masanobu Sato, Masayuki ORISAKA | 2023-02-21 |