Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851745 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Naozumi Fujiwara, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2023-12-26 |
| 11769663 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masahiko Kato, Yu YAMAGUCHI, Yuta SASAKI | 2023-09-26 |