Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851745 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Masayuki OTSUJI, Naozumi Fujiwara, Masahiko Kato, Hiroaki Takahashi | 2023-12-26 |
| 11781653 | Sealing device | Takumi YAMADA, Hiromi SUGIHARA, Hisato YONAI, Toshiki Watanabe, Satoshi Yamanaka | 2023-10-10 |
| 11769663 | Substrate processing method and substrate processing apparatus | Masayuki OTSUJI, Hiroaki Takahashi, Masahiko Kato, Yuta SASAKI | 2023-09-26 |