Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670523 | Substrate processing apparatus | Takashi Ota, Tomoaki Aihara, Masayuki Hayashi, Kunio Yamada | 2023-06-06 |
| 11569104 | Substrate processing apparatus and substrate processing method | Takashi Ota, Masayuki Hayashi, Akihiro Nakashima | 2023-01-31 |