Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670523 | Substrate processing apparatus | Takashi Ota, Masayuki Hayashi, Jiro Okuda, Kunio Yamada | 2023-06-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670523 | Substrate processing apparatus | Takashi Ota, Masayuki Hayashi, Jiro Okuda, Kunio Yamada | 2023-06-06 |