Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822318 | Substrate processing apparatus, substrate processing system, and substrate processing method | Koji Hashimoto, Shinji Shimizu, Masahiro Yamamoto | 2023-11-21 |
| 11686603 | Pressure type flowmeter and fluid control device | Tadahiro Yasuda, Kentaro Nagai | 2023-06-27 |