Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822318 | Substrate processing apparatus, substrate processing system, and substrate processing method | Koji Hashimoto, Hiroshi Horiguchi, Masahiro Yamamoto | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822318 | Substrate processing apparatus, substrate processing system, and substrate processing method | Koji Hashimoto, Hiroshi Horiguchi, Masahiro Yamamoto | 2023-11-21 |